| 摘要 |
PROBLEM TO BE SOLVED: To provide the manufacture of a diffraction grating which is free of restrictions on the material for the substrate or the grating and that is capable of precisely forming the grating. SOLUTION: In the manufacture of a diffraction grating 1, a metal film 3 is laminated on the surface 21 of a glass substrate 2, with a grid resist pattern 41 formed on the surface 31 of the metal film 3. Using the resist pattern 41 as a mask, the metal film 3 is etched by acid, thereby removing the metal film 34 exposed in the resist pattern 41. A grating forming film 5 is vapor- deposited on the surface 21 of the substrate 2 exposed on the surface of the through the resist pattern 41, with the resist pattern 41 lifted off from the metal film 32, so that a grating film 51 is left on the surface 21 of the substrate 2. Finally, the metal film 32 left on the surface 21 of the substrate 2 is removed through etching with acid. The cross section of the resist pattern 41 is formed into a trapezoidal shape, with both side faces 46 becoming a slope facing upward. |
