MANUFACTURE OF ELECTRON EMITTING ELEMENT

摘要

PROBLEM TO BE SOLVED: To easily form an electron emitting section on a conductive thin film at a high yield by forming the conductive thin film between a pair of element electrodes arranged on an insulating substrate, and applying droplets from an ink jet injection device to form connecting terminals between the element electrodes and wires. SOLUTION: A pair of electrodes 2, 3, wires 6, 7, and a conductive thin film 4 between both electrodes 2, 3 are formed in sequence on an insulating substrate 1 by vacuum deposition and photolithography. Droplets are applied by an ink jet injection device, and the electrodes 2, 3 and the wires 6, 7 are connected by the precursors of connecting terminals 8a, 8b. A solution dispersed with a metal in water or a solvent is used for the droplets. A system capable of controlled forming and feeding an extremely small quantity of droplets, e.g. a piezo-jet system, is preferably used for the ink jet injection device. The precursors are baked to remove the solvent, and the connecting terminals 8a, 8b are formed. A forming process is applied to form an electron emission section 5 on the thin film 4, and an electron emitting element is obtained.