发明名称 WET PROCESSING METHODS FOR THE MANUFACTURE OF ELECTRONIC COMPONENTS USING LIQUIDS OF VARYING TEMPERATURE
摘要 <p>The present invention is directed to wet processing methods for the manufacture of electronic component precursors, such as semiconductor wafers used in integrated circuits. More specifically, this invention relates to methods of manufacturing electronic component precursors using liquids of varying temperature.</p>
申请公布号 WO1999062837(A1) 申请公布日期 1999.12.09
申请号 US1999012144 申请日期 1999.06.02
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