ROBUST SUBSTRATE-BASED MICROMACHINING OF SENSORS AND ACTUATORS

摘要

The use of robust substrates (31A and 31B) in the surface micro-machined structures combines (1) the use of micro-machining technology; (2) the use of electronic packaging technologies; and (3) the use of conventional machining techniques to create a new class of micro-machined structures. In particular, a robust substrate-based micro-machined structure is a capacitive pressure sensor (30) including a pressure sensitive diaphragm (35) and an electrode (38).