发明名称 |
Reactor having an array of heating filaments and a filament force regulator |
摘要 |
An apparatus for adjusting the tension on a heating filament in a reactor used in carbon deposition on a substrate via chemical-vapor deposition is disclosed, as is a method for preventing breakage of the filaments during operation. The apparatus comprises a force regulator attached to an array of heating filaments. Preferably, the force regulator is adjustable and is adjusted prior to reactor operation and/or periodically or continuously as the filaments lengthen due to carburization in the carbon-vapor environment of the reactor. The adjustable force regulator attached to an array of filaments enables effective regulation of the force on a filament during reactor operation and provides an easily-maintained reactor with quick turn-around time between cycles of use.
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申请公布号 |
US5997650(A) |
申请公布日期 |
1999.12.07 |
申请号 |
US19980187497 |
申请日期 |
1998.11.06 |
申请人 |
SP3, INC. |
发明人 |
HERLINGER, JAMES E.;STUDLEY, DAVID K.;ZIMMER, JERRY W. |
分类号 |
C23C16/14;C23C16/27;C23C16/44;(IPC1-7):C23C16/00 |
主分类号 |
C23C16/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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