ROTARY TYPE SUBSTRATE TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To enhance a medicinal liquid recovery rate in the case a square substrate, such as glass substrate for liquid crystals, is subjected to a wet process treatment with a rotary type substrate treatment apparatus. SOLUTION: The circumference of a rotating mechanism 10 for rotating a rotor 11 is provided with a liquid recovering cup 20 of a two-stage system. This liquid recovering cup 20 is vertically moved relatively to the rotating mechanism 10, by which two kinds of the liquids splashed from the substrate 1 on the rotor 11 by rotation of the rotor 11 are separated and recovered. A liquid recovering auxiliary plate 13 consisting of a disk of nearly the same diameter as the diameter of the outer periphery of the rotating circle of the substrate 1 is disposed below the rotor 11. The liquid falling downward through the blanking hole of the rotor is received by the liquid recovering auxiliary plate 13 and is introduced into the liquid recovering cup 20 at the time of the low-speed rotation of the rotor 11.