SPUTTERING DEVICE AND FORMATION OF FILM THEREBY,申请号JP19980139322-传众专利搜索

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发明名称	SPUTTERING DEVICE AND FORMATION OF FILM THEREBY
摘要
申请公布号	JPH11335835(A)	申请公布日期	1999.12.07
申请号	JP19980139322	申请日期	1998.05.21
申请人	NEC CORP	发明人	KUBOGATA MASAYUKI
分类号	C23C14/34;C23C14/50;G11B7/26;(IPC1-7):C23C14/50	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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