发明名称 CARRYING DEVICE AND MANUFACTURE OF THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To reduce the cost, the occupied space and the carry waiting time by comprising a controller for managing the information on the existence position and the processing information of a matter to be handled in a carrier. SOLUTION: When an operator registers a lot ID and the process flow ID of a lot A to a progress management controller 900, the apparatus alocating instruction of the lot A is given to an equipment group management controller 800B for managing a manufacturing apparatus which processes the next process of the lot A, and one manufacturing apparatus 700B is selected from the operation plan of the manufacturing apparatus which can process the next process of the lot A. When the operator places the lot A on an inlet and outlet port of a carrying and storing device, a carrying and storing device controller 150A confirms the operating state of a crane, retrieves the vacant shelf in order of shelf boards from the shelves in the carrying and storing device when the crane is not occupied by the other work, and gives the instruction the crane for carrying the lot from the inlet and outlet port to the vacant shelf when the vacant shelf exists.</p>
申请公布号 JPH11334810(A) 申请公布日期 1999.12.07
申请号 JP19990079088 申请日期 1999.03.24
申请人 HITACHI LTD 发明人 KOBAYASHI YOSHIAKI;KOBAYASHI HIDE;HAMADA TOYOHIDE;WAKIYAMA FUMITOSHI;SHIMIZU MICHIYUKI;YAGYU MITSUYASU
分类号 B65G1/00;B65G1/137;H01L21/02;H01L21/677;H01L21/68;(IPC1-7):B65G1/00 主分类号 B65G1/00
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