| 摘要 |
PROBLEM TO BE SOLVED: To enable secure, effective and uniform treatment (e.g. modification) of the surface of an article to be treated by making effective use of a chemically active neutral excitation species to a maximum extent, without generating damage due to an ion or an electron. SOLUTION: This treatment device has a high voltage electrode and a grounding electrode 6 using a punching metal, both of which are plain plate-shaped and arranged opposite to each other with an insulator sandwiched in between and further has a discharge part consisting of a microspace formed between both the electrodes and the like. In addition, a mixed reaction gas is supplied in the state of a countercurrent from plural spots around both the electrodes and the like to the discharge part through slit-like gas supply holes 18A..., 18B.... This mixed reaction gas is decomposed by excitation by a glow discharge plasma to be generated following the application of a high-frequency voltage to the spaces between both electrodes and the like. Thus, a gas flow containing a chemically active neutral excitation species is generated and is applied to the surface of an article to be treated arranged oppositely to the discharge part outside thereof through plural gas flow ejection holes 3... formed on the entire surface of the grounding electrode 6. |
