发明名称 Silicon-based semiconductor photodetector with an improved optical fiber guide groove
摘要 The present invention provides a semiconductor photodetector formed over a substrate and being positioned adjacent to an optical fiber guiding groove also formed in said substrate bounding structure, said semiconductor photodetector having an optical waveguide layer including an optical absorption layer, wherein an edge portion of said optical waveguide layer is bounded to a side portion of said optical fiber guiding groove through an insulation layer having an refractive index higher than any parts of said optical waveguide layer.
申请公布号 US5999675(A) 申请公布日期 1999.12.07
申请号 US19970934750 申请日期 1997.09.22
申请人 NEC CORPORATION 发明人 SUGIYAMA, MITSUHIRO
分类号 G02B6/42;H01L27/14;H01L31/0232;(IPC1-7):G02B6/30 主分类号 G02B6/42
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