| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas feeding apparatus at a lower cost which secures the accuracy at a low flow rate without lowering the maximum flow rate of a gas. SOLUTION: A primary decompression device 92 disposed on the upstream side of an electropneumatic proportional valve 93 for adjusting a feeding flow rate of a gas is so arranged that a high pressure gas supplied from a gas cylinder 54 is adjusted to be reduced down to 4 kgf/cm<2> or 1 kgf/cm<2> , for instance, and supplied to the electropneumatic proportional valve 93. A knob 10 arranged on a front panel is turned and operated to control the primary decompression device 92 through a shaft 11. Thus, the high pressure gas is reduced down to 4 kgf/cm<2> or 1 kgf/cm<2> in pressure to be supplied to the electropneumatic proportional valve 93. |
