发明名称 |
BOARD PROCESSING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To decrease the amount of a mist of processing liquid dispersed into the atmosphere in a processing tank. SOLUTION: Over a transport roller 2, a plurality of spray nozzles 3 are installed for spraying a processing liquid to the oversurface of a board S. Under the roller 2, a liquid butt 4 in the form of a flat vessel with the over-part left open is installed in a position confronting the nozzles 3 with the roller 2 interposed. The processing liquid is previously stored in the butt 4. The liquid from the nozzles 3 injected to the part with no board S existing is put in the processing liquid stored in the butt 4. This suppresses sprashing into atmosphere of the liquid injected to such a part as not intended.
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申请公布号 |
JPH11334870(A) |
申请公布日期 |
1999.12.07 |
申请号 |
JP19980144563 |
申请日期 |
1998.05.26 |
申请人 |
DAINIPPON SCREEN MFG CO LTD |
发明人 |
TANIGUCHI TAKESHI;OGASAWARA MITSUO;YANAGISAWA NOBUO |
分类号 |
G02F1/13;B08B3/02;B65G49/02;G02F1/1333;H01L21/304;H01L21/306;(IPC1-7):B65G49/02;G02F1/133 |
主分类号 |
G02F1/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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