发明名称 BOARD PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To decrease the amount of a mist of processing liquid dispersed into the atmosphere in a processing tank. SOLUTION: Over a transport roller 2, a plurality of spray nozzles 3 are installed for spraying a processing liquid to the oversurface of a board S. Under the roller 2, a liquid butt 4 in the form of a flat vessel with the over-part left open is installed in a position confronting the nozzles 3 with the roller 2 interposed. The processing liquid is previously stored in the butt 4. The liquid from the nozzles 3 injected to the part with no board S existing is put in the processing liquid stored in the butt 4. This suppresses sprashing into atmosphere of the liquid injected to such a part as not intended.
申请公布号 JPH11334870(A) 申请公布日期 1999.12.07
申请号 JP19980144563 申请日期 1998.05.26
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 TANIGUCHI TAKESHI;OGASAWARA MITSUO;YANAGISAWA NOBUO
分类号 G02F1/13;B08B3/02;B65G49/02;G02F1/1333;H01L21/304;H01L21/306;(IPC1-7):B65G49/02;G02F1/133 主分类号 G02F1/13
代理机构 代理人
主权项
地址