PRODUCTION OF GASEOUS NITROGEN TRIFLUORIDE

摘要

PROBLEM TO BE SOLVED: To suppress the deposition of nickel dissolved in an anode side on a cathode plate and to obtain high-purity gas by using the nickel for the anode and carbon for the cathode as electrode materials at the time of electrolyzing an electrolytic bath of NH4 F.χHF. SOLUTION: The nickel is used for the anode and the carbon for the cathode as the electrode materials to be used at the time of effecting the electrolysis of the electrolytic bath of the NH4 F.χHF. Theχvalue of the NH4 F.χHF of the electrolytic bath is preferably regulated to 1.5 to 1.8 and the electrolytic bath having a low content of org. matter is preferably used. Since the electrolytic bath is solid at room temp., the electrolytic bath is used by heating the bath usually to about 80 to 150 deg.C at the time of electrolysis. The nickel plate to be used for the anode is preferably nickel having an S component and C component in particular at lower contents. The carbon to be used as the cathode is adequately carbon which is dense, is low in porosity. and has bending strength of >=80 Mpa. The electrolysis is usually effected at a current density of 1 to 10 A/dm<2> .