| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to perform the qualitative analysis of a boron compound contained in an ambient air in a clean room for manufacturing a semiconductor efficiently and in a short time with high sensitivity by capturing the boron compound in the air with the help of a solid scavenger and immersing this scavenger in a liquid to desorb the captured boron compound. SOLUTION: A boron compound contained in air is adsorbed with a capturing column 1 by sucking the air in the capturing column 1 using a suction pump 2. Then the capturing column 1 adsorbing the boron compound is immersed into a liquid and, at the same time, is treated using an ultrasonic device 3. Next, the liquid is sucked by using, for example, a PFT suction and filtering bottle 4, and at the same time, is analyzed with the assistance of a plasma mass spectrometer 5 to obtain the qualitative analytical results showing the content of the boron compound contained in the air. In this case, the capturing column 1 to be used is of such a construction that a quartz glass tube with a high ultrasonic transmittance is filled with a high purity silica or an anion exchange resin and both ends of the quartz glass tube are closed with quartz glass fibers. The air is circulated through the interior of the tube.</p> |
