发明名称 Active-matrix liquid crystal display unit in which gate and/or data lines are made of Cr containing Ne-atoms
摘要 An active-matrix liquid crystal display unit in which gate lines and drain lines disposed around a TFT device and a transparent pixel electrode are formed by a metal film including Ne atoms in a Cr film so as to provide a resistivity of 22 mu OMEGA cm or below for the metal film and an absolute value of 200 MPa or below for the film stress.
申请公布号 US5999236(A) 申请公布日期 1999.12.07
申请号 US19970972199 申请日期 1997.11.18
申请人 HITACHI, LTD. 发明人 NAKAJIMA, KATSUNORI;ONISAWA, KENICHI;CHAHARA, KENICHI;KAMEI, MITSUHIRO
分类号 G02F1/136;C23C14/18;G02F1/1362;G02F1/1368;H01L21/28;H01L21/336;H01L29/49;H01L29/786;(IPC1-7):G02F1/136;G02F1/134;H01L29/04 主分类号 G02F1/136
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