发明名称 |
Active-matrix liquid crystal display unit in which gate and/or data lines are made of Cr containing Ne-atoms |
摘要 |
An active-matrix liquid crystal display unit in which gate lines and drain lines disposed around a TFT device and a transparent pixel electrode are formed by a metal film including Ne atoms in a Cr film so as to provide a resistivity of 22 mu OMEGA cm or below for the metal film and an absolute value of 200 MPa or below for the film stress.
|
申请公布号 |
US5999236(A) |
申请公布日期 |
1999.12.07 |
申请号 |
US19970972199 |
申请日期 |
1997.11.18 |
申请人 |
HITACHI, LTD. |
发明人 |
NAKAJIMA, KATSUNORI;ONISAWA, KENICHI;CHAHARA, KENICHI;KAMEI, MITSUHIRO |
分类号 |
G02F1/136;C23C14/18;G02F1/1362;G02F1/1368;H01L21/28;H01L21/336;H01L29/49;H01L29/786;(IPC1-7):G02F1/136;G02F1/134;H01L29/04 |
主分类号 |
G02F1/136 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|