| 摘要 |
PROBLEM TO BE SOLVED: To stabilize the pulse output light of a gas laser device by injecting discharged electricity between the size of the ejection of discharged electricity for oscillating the pulse and the size of the injection of discharged current without the emission of laser beams, and controlling a drive power. SOLUTION: Electricity discharge parts 3, filled with gas laser medium apply microwaves which magnetrons 6 driven by drive power sources 7 generate through waveguides 5, discharge electricity, excite the gas laser mediums and generate pulse-like laser beams into a light oscillator. At that time, a control circuit 8 injects discharged electricity between the size of the injection of discharged electricity for oscillating the pulse and the size of the injection of discharged electricity without the laser beam, and controls a system so that drive signals corresponding to laser output and a pulse waveform are given to the drive power source 7. Thus, the laser output of similar pulse width can be obtained for the pulse command of a controller 8, and therefore pulse laser output can be stabilized. |
