| 摘要 |
<p>A wafer robot includes a first end effector and a second end effector, each having one or more wafer holders. A robot arm assembly moves the first and second end effectors to perform separate operations. A wafer carrier may be loaded or unloaded with one or more operations of the first end effector and one or more operations of the second end effector. The wafer robot may include a vacuum system for vacuum gripping of wafers on the wafer holders. The end effectors may further include vacuum sensors for sensing the presence of a wafer on each of the wafer holders.</p> |
