发明名称 |
QUARTZ GLASS CRUCIBLE FOR PULLING SILICON MONOCRYSTAL AND METHOD OF MANUFACTURING THE SAME |
摘要 |
A quartz glass crucible for pulling out a silicon monocrystal therefrom, capable of pulling a flawless silicon monocrystal therefrom and improving greatly the monocrystallinity of the silicon monocrystal, and a method of manufacturing the same. Specifically, a quartz glass crucible for pulling out a silicon monocrystal therefrom, comprising a crucible base member of a translucent quartz glass layer, and a transparent quartz glass layer formed on an inner surface of the crucible base member, wherein bubble expansion of not less than 0.5 mm in diameter does not occur within 1 mm of an inner surface of the crucible from which the silicon monocrystal has been pulled out. |
申请公布号 |
WO9961685(A1) |
申请公布日期 |
1999.12.02 |
申请号 |
WO1999JP02703 |
申请日期 |
1999.05.24 |
申请人 |
SHIN-ETSU QUARTZ PRODUCTS CO., LTD.;SATO, TATSUHIRO;MIZUNO, SHIGEO;OHAMA, YASUO |
发明人 |
SATO, TATSUHIRO;MIZUNO, SHIGEO;OHAMA, YASUO |
分类号 |
C03B20/00;C03B19/09;C30B15/10;C30B29/06;C30B35/00;(IPC1-7):C30B15/10 |
主分类号 |
C03B20/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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