发明名称 Ion or electron beam source for e.g. for multi-cusp ion source
摘要 Permanent magnets are built into the electrode grating structure, so that the charged particles of the plasma are deflected away from the grating structure into extraction holes, so that the grating structure is protected against wear. By localizing gas discharge in the region of the extraction magnetic fields, the extraction surfaces can be made by a combination of repeated individual elements including magnet structures, mechanical carrying structures, local gas discharge structures and extraction openings.
申请公布号 DE19821802(A1) 申请公布日期 1999.12.02
申请号 DE19981021802 申请日期 1998.05.15
申请人 ANDRAE, JUERGEN 发明人
分类号 H01J37/077;H01J37/08;(IPC1-7):H01J37/08;H01J37/30 主分类号 H01J37/077
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