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发明名称
Surface inspection apparatus
摘要
申请公布号
EP0524348(B1)
申请公布日期
1999.12.01
申请号
EP19910122162
申请日期
1991.12.23
申请人
TENCOR INSTRUMENTS
发明人
MALIN, COSMAS, DIPL.-ING.;STEIGMEIER, EDGAR F., DR. ING.;NESENSOHN, THOMAS;SAWATZKI, HARRY L.;AUDERSET, HEINRICH
分类号
G01B11/30;G01M11/02;G01N21/88;G01N21/89;G01N21/93;G01N21/95;G01N21/956;G02B21/10;G11B5/84;G11B7/26;(IPC1-7):G01N21/88;G01N21/47
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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