发明名称 APPARATUS AND METHOD FOR PROTECTING CHEMICAL BATH SEALS
摘要 <p>A bath in which articles are processed by immersion in hot liquid chemicals has a chemical receptacle seated in a casing. Wetting of internal components in the casing, such as heating elements and thermal insulation, is prevented by a seal between the receptacle and the rim of the casing. The otherwise exposed seal is isolated from the external environment of the bath by a barrier of flowing water. The water flow shields the sealing material from corrosive chemical drips and fumes and also has a cooling effect which decreases thermal expansion of components in the region of the seal and thereby reduces structural stresses.</p>
申请公布号 EP0748427(B1) 申请公布日期 1999.12.01
申请号 EP19950911600 申请日期 1995.01.31
申请人 IMTEC PRODUCTS INC. 发明人 STRUVEN, KENNETH, C.
分类号 B08B3/04;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):F16K49/00 主分类号 B08B3/04
代理机构 代理人
主权项
地址