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发明名称
METHOD FOR REMOVING LIQUID ON SUBSTRATE SURFACE
摘要
申请公布号
KR100231952(B1)
申请公布日期
1999.12.01
申请号
KR19910003094
申请日期
1991.02.26
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.
发明人
ADRIAN, FRANCISCUS MARIA;JOHANNA, ANTOONITTE MARIA HUETHORST;JOHANNES, MARRA
分类号
F26B5/08;F26B21/14;H01L21/00;H01L21/304;(IPC1-7):H01L21/02
主分类号
F26B5/08
代理机构
代理人
主权项
地址
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