发明名称 |
Photoresist composition |
摘要 |
<p>A photoresist composition comprises as a uniform blend: (A) 100 parts by weight of a film-forming resinous compound which is, in the presence of an acid, subject to a change in solubility in an alkaline solution; and (B) from 0.1 to 30 parts by weight of an oxime sulfonate compound represented by the general formula NC-CR<1>=N-O-SO2-R<2>, in which R<1> and R<2> are, each independently from the other, a non-aromatic monovalent group.</p> |
申请公布号 |
EP0768572(B1) |
申请公布日期 |
1999.12.01 |
申请号 |
EP19960306821 |
申请日期 |
1996.09.19 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
SATO, MITSURU;NITTA, KAZUYUKI;HADA, HIDEO;HASHIGUCHI, TATSUYA;KOMANO, HIROSHI;NAKAYAMA, TOSHIMASA |
分类号 |
G03F7/004;G03F7/038;G03F7/039;H01L21/027;(IPC1-7):G03F7/004 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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