发明名称 Photoresist composition
摘要 <p>A photoresist composition comprises as a uniform blend: (A) 100 parts by weight of a film-forming resinous compound which is, in the presence of an acid, subject to a change in solubility in an alkaline solution; and (B) from 0.1 to 30 parts by weight of an oxime sulfonate compound represented by the general formula NC-CR<1>=N-O-SO2-R<2>, in which R<1> and R<2> are, each independently from the other, a non-aromatic monovalent group.</p>
申请公布号 EP0768572(B1) 申请公布日期 1999.12.01
申请号 EP19960306821 申请日期 1996.09.19
申请人 TOKYO OHKA KOGYO CO., LTD. 发明人 SATO, MITSURU;NITTA, KAZUYUKI;HADA, HIDEO;HASHIGUCHI, TATSUYA;KOMANO, HIROSHI;NAKAYAMA, TOSHIMASA
分类号 G03F7/004;G03F7/038;G03F7/039;H01L21/027;(IPC1-7):G03F7/004 主分类号 G03F7/004
代理机构 代理人
主权项
地址