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发明名称
A method for observing film thickness and/or refractive index
摘要
申请公布号
EP0622624(B1)
申请公布日期
1999.12.01
申请号
EP19940302911
申请日期
1994.04.25
申请人
RESEARCH DEVELOPMENT CORPORATION OF JAPAN
发明人
NAGAYAMA, KUNIAKI;ADACHI, EIKI
分类号
G01B11/06;G01N21/21;G01N21/41;G01N21/84;(IPC1-7):G01N21/21
主分类号
G01B11/06
代理机构
代理人
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