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发明名称
METHOD FOR MANUFACTURING PHASE SHIFT MASK
摘要
申请公布号
KR100232175(B1)
申请公布日期
1999.12.01
申请号
KR19920001991
申请日期
1992.02.12
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
LEE, WON-GI
分类号
H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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