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发明名称
RESIST COMPOSITION
摘要
申请公布号
KR100233367(B1)
申请公布日期
1999.12.01
申请号
KR19940007958
申请日期
1994.04.15
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
TAKEMURA, KATSUYA;ISHIHARA, TOSHINOBU;MARUYAMA, KAZUMASA;TAKEDA, YOSHIHUMI;SHIGSEMISTSU, MINOSRU;ITOH, KENICHI
分类号
G03F7/00;G03F7/004;G03F7/039;(IPC1-7):G03F7/00
主分类号
G03F7/00
代理机构
代理人
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