发明名称 A semiconductor memory device having a silicon on insulator substrate
摘要 A transistor including source/drain regions 116, a channel area, a gate oxide and a gate electrode 114a is formed on one side of a semiconductor substrate. A first insulator layer 118, capacitor 120, second insulating layer 122 are formed and then chemically mechanically polished before bonding a handling wafer 124 thereto. A third insulating layer 128 is then formed on the other surface of the semiconductor substrate and either a second gate electrode 126 (figure 3B) or a conductor electrically connected to the channel 126a and 126b (Figure 3A) is/are then formed.
申请公布号 GB2337851(A) 申请公布日期 1999.12.01
申请号 GB19990009584 申请日期 1999.04.26
申请人 * SAMSUNG ELECTRONICS CO. LTD. 发明人 YUN-GI * KIM
分类号 H01L21/28;H01L21/8242;H01L21/84;H01L27/02;H01L27/108;H01L27/12;(IPC1-7):H01L27/12 主分类号 H01L21/28
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