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发明名称
POLYSILICON LAYER ETCHING METHOD
摘要
申请公布号
KR100231850(B1)
申请公布日期
1999.12.01
申请号
KR19930030773
申请日期
1993.12.29
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
EUN, YOUNG-SUEOK;WOO, SANG-HO;CHOI, KUN-MIN;SONG, TAE-SHIK;LEE, HO-SUEOK
分类号
G03F7/00;(IPC1-7):G03F7/00
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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