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发明名称
IN-SITU DEPOSITION OF STOP LAYER AND DIELECTRIC LAYER DURING FORMATION OF LOCAL INTERCONNECTS
摘要
申请公布号
EP0960437(A1)
申请公布日期
1999.12.01
申请号
EP19980919791
申请日期
1998.04.22
申请人
ADVANCED MICRO DEVICES INC.
发明人
NGO, MINH, VAN;CHAN, DARIN, A.;SUN, SEY-PING;KITSON, TERRI;CAFFALL, JOHN
分类号
H01L21/314;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L21/314
代理机构
代理人
主权项
地址
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