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发明名称
EXPOSURE METHOD AND APPARATUS THEREOF
摘要
申请公布号
KR100232584(B1)
申请公布日期
1999.12.01
申请号
KR19960015664
申请日期
1996.05.11
申请人
ORION ELECTRIC CO., LTD.
发明人
HA, JONG-JIN
分类号
G03F7/20;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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