| 发明名称 |
Device for treating substrates in a fluid container |
| 摘要 |
A device for treating substrates includes a fluid container in which the substrates are contained during treatment. A nozzle system is connected to the sidewalls and/or bottom of the fluid container and includes a plurality of nozzles for introducing a fluid into the fluid container.
|
| 申请公布号 |
US5992431(A) |
申请公布日期 |
1999.11.30 |
| 申请号 |
US19980056586 |
申请日期 |
1998.04.07 |
| 申请人 |
STEAG MICROTECH GMBH |
发明人 |
WEBER, MARTIN;OSHINOWO, JOHN |
| 分类号 |
B08B3/02;B01J19/26;B08B3/10;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):B08B3/10 |
主分类号 |
B08B3/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
