| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable effective change of processing condition. SOLUTION: When a reticle is changed as the change of treatment condition in a stepper 6, a reservation condition informing means 16 of the stepper 6 informs a newly set reticle as a reservation reticle to a supply control unit 10, prior to the change of reticle. When a reservation reticle is informed from the reservation condition informing means 16, a delivery control means 24 of the supply control unit 10 indicates supply of a lot conformable to the reticle to a stocker 4. That is, before the stepper 6 changes the reticle, a lot to be treated with a new reticle is delivered from the stocker 4. In the stepper 6, all the lots supplied to the stepper 6 which contains the lot to be treated with the reticle before the change can be treated by changing to the new reticle, in the step that the new lot is supplied.</p> |
