TRANSISTOR STRUCTURE AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To enhance a CMOS device in latch up resistance, by a method wherein a side wall spacer/trough region is demarcated and formed by the use of hybrid photoresist which shows a positive-type, a negative type and an intermediate-type reaction to exposure light. SOLUTION: A gate oxide layer 2404 and a gate material layer 2406 are successively deposited on a wafer 2500, and side wall spacer troughs 2801 and 2802 are provided to the gate oxide layer 2404 and the gate material layer 2406 by the use of hybrid photoresist which shows a positive-type, a negative- type, and an intermediate-type reaction to exposure light. Three regions, a gate region 2804, a high source region 2806, and a high drain region 2808 are provided to the side wall spacer troughs 2801 and 2802, and a residual negative- type pattern 2526 and a residual hard mask layer 2408 are formed. By this setup, a CMOS device can be improved in latch-up resistance.