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发明名称
LIGHTING OPTICAL SYSTEM, AND EXPOSING DEVICE FOR EXPOSING METHOD USING THIS LIGHTING OPTICAL SYSTEM
摘要
申请公布号
JPH11329036(A)
申请公布日期
1999.11.30
申请号
JP19980155302
申请日期
1998.05.20
申请人
NIKON CORP
发明人
OTAKI KATSURA
分类号
G02B6/04;F21V8/00;G02F1/1335;G02F1/13357;G03F7/20;H01L21/027;(IPC1-7):F21V8/00;G02F1/133
主分类号
G02B6/04
代理机构
代理人
主权项
地址
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