| 摘要 |
PROBLEM TO BE SOLVED: To improve reliability for detecting a recognition mark in a visual inspection device for a substrate. SOLUTION: A discriminating means is provided for discriminating the position of a recognition mark 10 based on light receiving information by a photodetector to improve reliability for detection of a recognition mark. This means for discriminating the position comprises the position data for detecting the position of the recognition mark 10 based on the light receiving position of the photodetector, and a light amount data for discriminating the position of the recognition mark 10, based on the amount of receiving light. Thus, reliability for detecting the recognition mark can be improved. |
