发明名称 Clean room ceiling structure
摘要 A clean room ceiling structure includes a support structure and filter units with a filter frame and a filter secured in the filter frame. The filter frames are connected to the support structure. The filter units have sealing fluid grooves for sealing the filter units relative to the support structure.
申请公布号 US5993311(A) 申请公布日期 1999.11.30
申请号 US19970943550 申请日期 1997.10.03
申请人 MEISSNER & WURST GMBH CO. 发明人 FELLER, EUGEN;RENZ, MANFRED
分类号 B01D46/42;E04B9/00;E04B9/02;E04B9/06;E04B9/14;F24F3/16;F24F7/06;F24F13/28;(IPC1-7):B01L1/04 主分类号 B01D46/42
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