发明名称 |
Clean room ceiling structure |
摘要 |
A clean room ceiling structure includes a support structure and filter units with a filter frame and a filter secured in the filter frame. The filter frames are connected to the support structure. The filter units have sealing fluid grooves for sealing the filter units relative to the support structure.
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申请公布号 |
US5993311(A) |
申请公布日期 |
1999.11.30 |
申请号 |
US19970943550 |
申请日期 |
1997.10.03 |
申请人 |
MEISSNER & WURST GMBH CO. |
发明人 |
FELLER, EUGEN;RENZ, MANFRED |
分类号 |
B01D46/42;E04B9/00;E04B9/02;E04B9/06;E04B9/14;F24F3/16;F24F7/06;F24F13/28;(IPC1-7):B01L1/04 |
主分类号 |
B01D46/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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