| 摘要 |
PROBLEM TO BE SOLVED: To attain positioning for correction when the local distortion of an inspecting work is within an allowable range. SOLUTION: The whole positioning of a master pattern being a reference and a pattern to be measured which is image picked-up by a camera is performed (a step 106). Plural divided areas are set in the pattern to be measured, and the corresponding divided areas are set in the master pattern. The coordinates of at least four positioning marks are obtained in the divided areas of the pattern to be measured, and the coordinates of the corresponding positioning mark are obtained in the corresponding divided areas of the master pattern. A coordinate transformation formula between the pattern to be measured and the master pattern is decided from those coordinates, and the divided areas of the master pattern are transformed by the coordinate transformation formula, and the positioning of the master pattern and the pattern to be measured is performed for each divided area (a step 107). |
