| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning type aligner with low vibration, and a method for manufacturing a device using this device. SOLUTION: This scanning type aligner is provided with an original plate stage 2, substrate 13, illuminating system 14 for illuminating an original plate 1 placed on the original plate stage, projecting optical system 12 for projecting the pattern of the original plate illuminated by the illuminating system on a photosensitive substrate placed on the substrate stage, and masking blade for shading the illuminating light of the illuminating system. The pattern on the original plate is transferred and exposed on the photosensitive substrate by synchronously scanning the original plate and the photosensitive substrate by the original plate stage and the substrate stage to the illuminating system and the projecting optical system while operating shading by the masking blade for preventing any part other than the pattern area on the original plate from being illuminated. In this scanning type aligner, the masking blade is provided on the original plate stage. Also, the masking blade is arranged on almost the same horizontal face as the original plate stage, and moved to the opposite direction to that of the originals plate stage so that shading can be operated for preventing any part other than the pattern area from being illuminated. |
