| 摘要 |
The apparatus comprises a developing station (10), a second treatment station (12), a third treatment station (14). A liquid connection (52) is provided between the third treatment station (14) and the second treatment station (12). In a cleaning mode, liquid is fed from the developing station (10) to the third treatment station (14) to assist in cleaning of the third and second treatment stations (12, 14). The apparatus can be cleaned in a particularly convenient and efficient method, enabling optimum use of cleaning liquids and enabling automation of the cleaning process.
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