Method for producing electrolytic ionic water and an apparatus for the same

摘要

An electrolytic ionic water generating apparatus that produces electrolytic ionic water having a desired pH value and a semiconductor manufacturing apparatus that uses the electrolytic ionic water. The invention includes an electrolytic tank with an anode chamber and a cathode chamber, an introducing conduit or line to introduce electrolytic solution, and a discharge conduit or line to supply the generated electrolytic ionic water to other apparatuses such as a semiconductor washing machine and a semiconductor polishing machine. To control the pH value of the electrolyzed ionic water, pH meters and pH controllers are disposed on the introducing or discharge conduit. The pH meters detect the pH values of the electrolyzed ionic water and provide the detected result to the pH controllers. The pH controllers control the pH values of the supplied ionic water by controlling and changing the temperature of the solution.