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发明名称
PLASMA TREATMENT APPARATUS
摘要
申请公布号
JPH11330044(A)
申请公布日期
1999.11.30
申请号
JP19980139369
申请日期
1998.05.21
申请人
HITACHI LTD;HITACHI TECHNO ENG CO LTD
发明人
FURUSE MUNEO;SUKESAKO HIROYASU;WATANABE SEIICHI;KIKKAI MOTOHIKO;IKEGAMI EIJI
分类号
H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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