| 摘要 |
<p>PROBLEM TO BE SOLVED: To hold an article without causing troubles such as deflection of the article and damage, by bringing at least one member (e.g. a pin) into contact with a wafer surface on which a gas flow is generated, in order that the article may not move to a holder. SOLUTION: A holder 110 has a flat platform 130 positioned below a wafer. Friction pins 140 are stretched from the platform 130 and are in contact with a horizontal bottom surface in a wafer peripheral region for treating the wafer. The friction pins 140 are in contact with the inside part of the wafer bottom surface, if possible, the end portion of the wafer bottom surface. Moving of the wafer in the horizontal direction can be prevented by the friction pins 140. Other three or more pins are so arranged that the wafer is held in a horizontal state. The heights of the friction pins 140 are set to be parallel distance H. As a result, the friction pins are stretched almost on only a parallel position of the wafer. Hence, deflection is not generated in the wafer.</p> |
