| 摘要 |
PROBLEM TO BE SOLVED: To prevent the generation of an imperfect product which is caused by forgetting to take wafers at carrying of wafers from a carrier to specified equipment. SOLUTION: Carriers 3, arranged outside equipment which is shown on the left side of figure, are loaded on a carrier stocker 4 in order by a carrier transferring machine 1. A plurality of wafers 2 are accommodated in the carriers 3 loaded on the carrier stocker 4 and transferred from the carriers 3 to a boat 6 by a wafer transferring machine 5. After that, wafer detecting equipment 41 attached on the carrier transferring machine 1 detects forgetting of taking the wafers in the carriers 3, while moving upwards or downwards. When the forgetting to taking out the wafer is detected, this is notified to the user of the equipment. |
