| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic part mounting device which is equipped with a piping system capable of preventing foreign particles which are sucked in through a nozzle from entering an air path or an electronic part mounting device which is equipped with a piping system capable of easily cleaning enough an air path. SOLUTION: A valve body 25 formed of air-permeable filter material and a spring 26 which presses the valve body 25 against a valve seat 27 are provided in an air path 24 located above a nozzle 21. When the air path 24 is exhausted to vacuum-chuck an electronic part W to the lower end of the nozzle 21, the valve body 25 is pressed against the valve seat 27, so that foreign particles are prevented from entering the air path 24. When air is sent through the air path 24 with a high pressure, the valve body 25 is separated from the valve seat 27, and air is spouted out through the lower end of the nozzle 21, whereby the air path 24 and the valve body 25 are cleaned. |
