Semiconductor device having different sidewall widths and different source/drain depths for NMOS & PMOS structures

摘要

A CMOS device includes a first conductive type channel MOSFET having first side-wall spacers on side surfaces and having a source and drain region of an LDD structure, and a second conductive type channel MOSFET having second side-wall spacers on side surfaces and having a source and drain region of a single drain structure, wherein a width of the first side-wall spacers is larger than that of the second side-wall spacers, restraining the short channel effect and hot carrier effect as well.