| 摘要 |
A microfabricated gyroscope to measure rotation about an axis perpendicular to the surface of the substrate. The driving electrodes, X-axis sensing electrodes, and Y-axis sensing electrodes may all be fabricated from a signal structural layer. The gyroscope includes movable sensing electrode fingers which are positioned between paired stationary sensing electrode fingers. The position of the proof mass along the Y-axis is measured by a capacitive bridge. A voltage differential may be applied between the pairs of stationary electrode fingers to reduce the quadrature error, and a bias voltage may be applied between the movable and stationary electrode fingers to adjust the Y-axis resonant frequency.
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