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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11330262(A)
申请公布日期
1999.11.30
申请号
JP19980133389
申请日期
1998.05.15
申请人
MITSUBISHI ELECTRIC CORP
发明人
KIMURA HAJIME
分类号
H01L21/8234;H01L27/088;(IPC1-7):H01L21/823
主分类号
H01L21/8234
代理机构
代理人
主权项
地址
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