| 发明名称 |
Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus |
| 摘要 |
A carrier head for a chemical mechanical polishing apparatus includes a detachable retaining ring which may be used for centering the substrate during substrate loading.
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| 申请公布号 |
US5993302(A) |
申请公布日期 |
1999.11.30 |
| 申请号 |
US19970002213 |
申请日期 |
1997.12.31 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
CHEN, HUNG;ZUNIGA, STEVEN M. |
| 分类号 |
B24B37/00;B24B37/04;B24B41/06;H01L21/304;(IPC1-7):B24B29/00 |
主分类号 |
B24B37/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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