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发明名称
ION IMPLANTER
摘要
申请公布号
JPH11329336(A)
申请公布日期
1999.11.30
申请号
JP19980146574
申请日期
1998.05.11
申请人
NISSIN ELECTRIC CO LTD
发明人
ANDO YASUNORI;MAENO SHUICHI;MATSUDA YASUHIRO
分类号
H01J37/16;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
H01J37/16
代理机构
代理人
主权项
地址
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