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发明名称
摘要
申请公布号
JP2984969(B2)
申请公布日期
1999.11.29
申请号
JP19930307468
申请日期
1993.11.12
申请人
TOKYO EREKUTORON KK
发明人
NANBU MICHIHIRO;IIDA NARIAKI;YOSHIMOTO JUJI;KAWAKAMI YASUNORI
分类号
H01L21/677;H01L21/31;H01L21/316;H01L21/68;(IPC1-7):H01L21/31
主分类号
H01L21/677
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